Slurry Dispense System,SDS
Chen Yuan International provides high precision chemical mixing and dispense systems for wafer foundries and the packaged testing industry, which can be used for various processes of chemical-mechanical planarization (CMP), including Oxide, Poly, Tungsten, Cu, and A1 CMP.
Slurry is a mixture of abrasive and chemical additives, where the main ingredients of abrasives are silicon dioxide, aluminium dioxide, and cerium oxide, and the chemical additives are added according to the actual status.
Chen Yuan International’s chemical-mechanical slurry dispense machine is able to adjust the SDS design according to different requirements of slurry, and tailor a customized system in accordance with special requirements.
Chemical Dispense System,CDS
Chen Yuan International provides integration and establishment solutions in high precision and stable specialty chemical dispense system for wafer foundries, as well as packaged testing, food, and pharmaceutical industries, and is also able to design customized systems tailored to the specific requirements of the clients, so as to offer excellent and professional services with the clients during various phases, including R&D, mass production, and production capacity expansion, which creates a win-win situation.
Chen Yuan International is experienced in the construction of advanced plants in the industry, where the company has built distinctive chemical dispense equipment by integrating innovative design elements.
RD Slurry Dispense System,RD SDS
Used for various processes of chemical-mechanical planarization (CMP), including Oxide, Poly, Tungsten, Cu, and A1 CMP. Able to provide 2-6 simultaneous slurry R&D testing, as well as design customized systems tailored to specific requirements.
